A miniaturized seven-electrode conductivity and temperature integrated sensor

نویسندگان

چکیده

Abstract Marine environmental monitoring technology is the support of marine development, and its development level innovation capability have become important criteria for measuring a country’s science indicators. In order to meet application demand large-scale high-density deployment observation network, planar open seven-electrode conductivity platinum resistance temperature integrated sensor developed by using Micro Electro Mechanical System(MEMS) technology, combined with semiconductor micro nano precision processing technologies such as mask lithography physical sputtering. The measurement principle, probe design preparation, packaging calibration method this are presented. By calibrating fitting data sensor, good accuracy results were obtained. miniaturized has advantages small size, low power consumption, cost high processing, batch consistency, fully meets requirements network.

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ژورنال

عنوان ژورنال: Journal of physics

سال: 2022

ISSN: ['0022-3700', '1747-3721', '0368-3508', '1747-3713']

DOI: https://doi.org/10.1088/1742-6596/2189/1/012008